Plume / Mist Control (Acidic Mist / Organic Plume)
Advantages Introduction
Effective for HCl, H_2SO_4, HNO_3, Aqua Regia, and NH_4Cl mists / salts.
Treats small air volumes at the source (Local) to prevent Central Scrubber overload and reduce costs.
Eliminates visible stack plumes to improve corporate image and environmental compliance.
System Features
When exhaust gas flows through the mist eliminator, liquid droplets below 10μm are collected primarily through inertial impaction, direct interception, and Brownian motion, reducing fog formation.
Large amounts of acid mist are generated during wafer reclaim processes involving heated cleaning with sulfuric acid and hydrogen peroxide.
Treatment of fuming hydrochloric acid from hydrochloric acid tank truck dosing and hydrochloric acid preparation tanks.
Treatment of ammonium chloride salts generated during ammonia recovery and reuse processes. No chemical additives are required for adjusting inorganic acidic fumes.
