Activated Carbon Fluidized Bed

Application Combined Equipment : Condensation Pre-treatment System + Electric Heating High-Temperature Oxidation Furnace
Air Volume : 800 CMM
Treated Substances : Cyclopentanone / PGME / PGMEA / TMAH / IPA
Process : Wafer Packaging and Testing
Location : Hsinchu, Taiwan

Activated Carbon Fiber Cloth Concentration System

Application Combined Equipment : Low-Temperature Catalytic Oxidation Furnace
Air Volume : 150 CMM
Treated Substances : IPA / Acetone / PGME / PGMEA / Xylene
Process : Wafer Packaging and Testing
Location : Hsinchu, Taiwan

High-Efficiency Wet Scrubber

Air Volume : 120,000 CMH
Treated Substances : HF/HCl/HNO3/H3PO4/H2SO4
Process : Integrated Circuits
Location : Tainan, Taiwan

Zeolite Rotor

Application Combined Equipment : Low-Temperature Catalytic Oxidation Furnace
Air Volume : 400 CMM
Treated Substances : IPA / Acetone / PGME / Toluene / MEK / 2-Butoxyethanol / MIBK / Cyclohexanone
Process : Semiconductor Process Materials
Location : Tainan, Taiwan

 

Fume (Acid White Smoke) Treatment Equipment

Air Volume : 900 CMM
Treated Substances : Acids and Salts
Process : Semiconductor Process Materials
Location : Hsinchu, Taiwan